view article

Figure 5
(a) Three-dimensional representation of the reconstruction from experimental data (a strict selection of 260 patterns with a limited size distribution). (b) PRTF for the reconstruction in (a). The blue line represents the radial average of the three-dimensional PRTF and the orange line is the critically sampled three-dimensional PRTF. The critically sampled PRTF shows a full-period resolution of 28 nm.

Volume 5| Part 5| September 2018| Pages 531-541
ISSN: 2052-2525