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Figure 1
In GISAXS, the sample's `true' scattering is distorted because of refraction of incident and scattered rays, and multiple scattering effects, which lead to superimposed scattering features and non-monotonic modulation of intensities. These effects greatly complicate the analysis of GISAXS data. Here, we present a method to combine multiple GISAXS images measured at different incident angles, thereby reconstructing a faithful estimate of the unwarped reciprocal-space scattering. This reconstruction can be combined with grazing-transmission measurements (GTSAXS) if available, to further improve data quality. Example data shown in the figure were collected in GISAXS and GTSAXS geometry on a thin film of shear-aligned block copolymer. The reconstruction is difficult to assess near [Q_{x} \simeq 0] because of the beamstop. However, the structural peaks resolved elsewhere demonstrate the quality of the reconstruction.

Volume 5| Part 6| November 2018| Pages 737-752
ISSN: 2052-2525