Figure 2
Experimental geometry for grazing-incidence scattering experiments. (Left) An incident X-ray beam (black) is refracted upon entering a thin film, and further refracted upon entering the substrate. Thus, the transmitted beam (blue) is shifted relative to the direct-beam position. Scattered rays (purple) are also refracted as they exit the film. As a result, a scattering event (purple ring) occurring with angle in the sample's reciprocal space (Q) is observed at a different apparent scattering angle () and therefore experimentally measured on the detector at a different reciprocal-space coordinate (q). (Right) An example GISAXS image, with the qz positions noted for the transmitted beam (T), the horizon (H), the Yoneda (Y) and the specular reflected beam (R). |