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Figure 3
Conceptual three-dimensional renderings of (a) electrostatic and (b) magnetic microlens designs. The electrostatic lens concept in (a) has a cutout showing the inner-control electrode. The magnetic microlens in (b) consists of a flat metal coil on top of a non-conductive support. (c) Electrostatic potential distribution calculated through numerical finite element analysis of a three-electrode (`Einzel') electrostatic lens. The outer electrodes are kept at ground potential and act as shields. The control voltage is applied to the inner electrode. The electron beam passes through the inline circular openings in the electrodes.

Volume 7| Part 3| May 2020| Pages 566-574
ISSN: 2052-2525