view article

Figure 3
Demonstration results of the nanoprobe scanner. (a) Far-field images of the focused X-ray without (top) and with (bottom) the prisms. The scale bar denotes 1 mm. (b) The two-dimensional wavefront error of the nanoprobe scanner at the grating plane. The scale bar denotes 50 µm. (c) Focusing profiles in the horizontal (left) and vertical (right) directions. The red dots indicate the experimental data. The black solid lines represent the fitting results with the sum of three Gaussian functions. The focus size was 53.2 nm (H) × 52.5 nm (V) in FWHM. (d) An SXM image obtained using the nanoprobe scanner. A transmission image of the radial test pattern made of 500 nm thick tantalum. The scale bar denotes 0.5 µm.

Volume 8| Part 5| September 2021| Pages 713-718
ISSN: 2052-2525