view article

Figure 6
Two examples of silicon cRED rocking curves. (a) and (b) are experimental data. Most experimental rocking curves have a simple peak like (a) [{\overline 9} \, {\overline 3} \, {\overline 3}], while less than 3% show dynamical structure like (b) 311. (c) and (d) The corresponding dark-field LACBED simulations (specimen thickness 185 nm). The nominal beam path is a red line, with frame numbers in yellow. Intensity profiles along the red line give the rocking curves (e) and (f). The difference in frame numbers (a) to (e) and (b) to (f) is caused by a varying slew rate [Fig. 9(b)]. (g) and (h) Applying the angular spread of the incident beam (Fig. 10) as a convolution to the simulation gives simulated rocking curves that are a good match to experiment.

Volume 10| Part 1| January 2023| Pages 118-130
ISSN: 2052-2525