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Figure 2
Example of a pFIB-milled crystal lamellae using the xenon plasma, unmilled in the (a) SEM and (b) FIB, and milled to a targeted thickness of 200 nm in (c) the SEM view. Example of a wedge lamella at (d) the coarse step (e) and final wedge step.

IUCrJ
Volume 10| Part 3| May 2023| Pages 270-287
ISSN: 2052-2525
https://doi.org/10.1107/S2052252523001902