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Figure 4
(a) F(Q, χ) for the commercial ITO film, shown for each of the integrated slices. (b) G(r, χ) for the commercial ITO film. (c) The proposed orientation of the ITO film with atomic pair correlations labeled corresponding to the peaks in (b). (d), (e), (f) F(Q, χ), G(r, χ) and proposed orientation for the ALD-grown ITO film, respectively. For (c) and (f): the gray plate indicates the glass substrate and the crystal structure is In2O3 (ICSD entry 14387, space group 206). The figures are generated with VESTA (Momma & Izumi, 2011BB40).

IUCrJ
Volume 11| Part 1| January 2024| Pages 120-128
ISSN: 2052-2525
https://doi.org/10.1107/S2052252523010357