Measurement of strain and lattice parameter in epitaxic layers

A means of measuring strain and lattice parameter directly in epitaxic layers by `double-crystal' X-ray diffraction is presented. The method described has three major advantages; that it is achieved by a simple addition to a commercial goniometer; that the area of sample illuminated is defined solely by the collimator; and that single or double-crystal diffraction can be selected, simultaneously if needed, on exactly the same specimen area.