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Synchrotron radiation was used to measure the rocking curves from (Ga,In)(As,P) single layers grown on an InP (100) oriented substrate. The incident angle was varied (changing correspondingly the X-ray incident-beam wavelength) in order to measure at extremely asymmetrical Bragg diffraction down to a glancing angle of 0.35°. The measured rocking curves could be interpreted by the semi-kinematic model of Petrashen [Fiz. Tverd. Tela (1974). 16, 2168-2175] with corrections for X-ray refraction and for the width of the rocking curve from the extended dynamical theory.
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