A correction of the Seemann–Bohlin method for stress measurements in thin films

The deviation of X-ray data measured by the Seemann–Bohlin method from the predicted linear relationship is studied. A linear d versus sin² ψ relation can be achieved by a modification of the theory based on an average of the Voigt and Reuss models. However, because the Seemann–Bohlin method has to use low 2θ values, it is intrinsically less accurate than the Bragg–Brentano method, particularly for low stress values.