![j logo](http://journals.iucr.org/logos/jicons/j_36x36.png)
Germanium nanostructures embedded in amorphous SiOx matrices were investigated by different X-ray techniques. We report either randomly distributed or layer-organized arrangements of the nanoclusters or nanocrystals, depending on the sputtering conditions. Recrystallization was found to occur by annealing the films near the melting point of germanium.