X-ray Fine Structure Investigation of Germanium Nanoclusters

Germanium nanostructures embedded in amorphous SiO_x matrices were investigated by different X-ray techniques. We report either randomly distributed or layer-organized arrangements of the nanoclusters or nanocrystals, depending on the sputtering conditions. Recrystallization was found to occur by annealing the films near the melting point of germanium.