Figure 2
(a) The X-ray energy response of the four-layer detector for A-direction injection (see Fig. 1a). The curve is calculated using a 10 µm-thick dead layer and R = 1. (b) Quantum efficiencies η/E divided by R for B-direction injection for the first front layer of the multilayer detector and for newly designed multilayer detectors having wafer sizes 10 × 10 mm (d-10) and 100 × 100 mm (d-100). (c) The diffusion effect R on η/E is calculated as a function of dsub/L. Here, L = 100 µm and dwaf = 300 µm. |