view article

Figure 3
An example of the energy-dispersive reflectivity measurement (rough data before correction). The sample is SiO2 on an Si wafer. The oscillation intensity of measurement indicates that the thickness of SiO2 is 200 Å. The incident X-ray angle is fixed at 1.2° and the detector fixed at 2.4°.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Follow J. Synchrotron Rad.
Sign up for e-alerts
Follow J. Synchrotron Rad. on Twitter
Follow us on facebook
Sign up for RSS feeds