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Figure 2
Substrate-spinning mechanism for homogenizing the layer thickness of the multilayer filter (Takagi et al., 1995BB8).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 5| Part 3| May 1998| Pages 603-605
https://doi.org/10.1107/S0909049598001496
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