Figure 5
(a) 20-turn direction-alternated measurements of the precision rotary stage. The maximum expansion of the piezotranslator is 60 µm; the expansion conversion to the rotation factor is 1.5 arcsec/1.0 µm. (b) Data for the 20th measurement and their line fitting (dots and line, left Y axis) and angular positioning error (open circles, right Y axis). |