Figure 6
Distributions of the positioning error measured with an autocollimator (DA200) and their fitting by a normal distribution. The X and Y directions of the autocollimator are perpendicular and parallel to the rotary axis, respectively. The errors in the Y direction correspond to intrinsic uncertainties of the measurement system, which are caused by the atmospheric fluctuation and instrumental resolution of the autocollimator. The standard deviations in the X and Y directions are 0.27 and 0.15 arcsec, respectively. The error distribution in the X direction is considered to be enlarged by the deviation from circularity of the rolling bearing. |