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Figure 1
PMMA resist thickness as a function of photon energy. The ratio of top to bottom dose within the resist was assumed to be 5. The values were calculated from mass attenuation coefficients tabulated by the National Institute of Standards and Technology (NIST) (http://physics.nist.gov/PhysRefData/XrayMassCoef/cover.html).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 5| Part 3| May 1998| Pages 1095-1098
https://doi.org/10.1107/S0909049597019547
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