Figure 4
Synchrotron radiation power from a bending magnet and wavelength shifter at 7.5 T (curve 1). Parameters in the calculation were: storage ring operated at 1.3 GeV (curve 5) and 1.5 GeV (curve 3) electron energies with a current of 100 mA. Power available for lithographic applications: at the bending-magnet beamline, distance to X-ray source 10 m, no optical element, 125 µm Be window (1.3 GeV, curve 4, and 1.5 GeV, curve 6); at the wavelength shifter beamline, distance to X-ray source 10 m, no optical element, total of 150 µm graphite filters and 250 µm Be window (curve 2). |