Figure 3
Calculated energy resolution of the wavelength-dispersive spectrometer as a function of the sample–detector distance for the Cu K–L(Kα) line with an Si(220) analyser crystal. The spatial resolution of the detector is represented as s. An intrinsic width of 26.5 µrad, a beam size of 5 µm and a takeoff angle of 10° were used for the calculation. |