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Figure 4
The knife-edge response curve of the focused beam. The knife edge is fabricated by KOH-etching of the Si wafer. Al is deposited on the edge to obstruct soft X-rays. The beam size is 0.16 µm using a 25–75% criterion.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 5| Part 3| May 1998| Pages 1111-1113
https://doi.org/10.1107/S090904959701426X
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