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Figure 2
Geometrical resolution of the SU8 monochromator including effects of aberrations, slit width (entrance slit 10 µm, matched exit slit) and slope errors (1 µrad r.m.s. on each optical surface), and diffraction-limited resolution for low-energy gratings (AP is the aperture angle).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 5| Part 3| May 1998| Pages 719-722
https://doi.org/10.1107/S0909049597018669
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