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Figure 2
Vacuum system of NIJI-III. SIP: sputter-ion pump; NEG: non-evaporable getter pump; TMP: turbo-molecular pump for rough pumping. |
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Figure 2
Vacuum system of NIJI-III. SIP: sputter-ion pump; NEG: non-evaporable getter pump; TMP: turbo-molecular pump for rough pumping. |