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Figure 1
Measured reflectivity intensities of a (Ta/Si)60 multilayer: (a) a specular scan and (b) an off-specular scan with an offset angle of 0.1°. Solid lines represent the results of the fitting. |
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Figure 1
Measured reflectivity intensities of a (Ta/Si)60 multilayer: (a) a specular scan and (b) an off-specular scan with an offset angle of 0.1°. Solid lines represent the results of the fitting. |