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Figure 2
Top: a schematic side view of the key elements, showing the specially shaped crystal and two actuators in different degrees of detail. The cooling is either realized by a direct water flow inside the silicon cavity or by a water-cooled copper block and an indium–gallium coupling. Bottom: a detailed view of one actuator. The strain gauges attached to the elastic hinge measure the generated force. |


journal menu![[Figure 2]](ml3364fig2.jpg)



