Synchrotron-radiation-induced formation of salt particles on an X-ray lithography mask

Utsumi, Y.; Takahashi, J.; Hosokawa, T.

doi:10.1107/S0909049597017603

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 2
The time dependence of the stereoscopic microscope images of the contamination particles synthesized on the X-ray mask. (a) Before synchrotron radiation irradiation, (b) 72 h and 46 min after synchrotron radiation irradiation starts, (c) 6 min after synchrotron radiation irradiation and venting the chamber with air, (d) 60 min after venting.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 5| Part 3| May 1998| Pages 1141-1143

https://doi.org/10.1107/S0909049597017603

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