Synchrotron-radiation-induced formation of salt particles on an X-ray lithography mask

Utsumi, Y.; Takahashi, J.; Hosokawa, T.

doi:10.1107/S0909049597017603

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 4
The concentrations and time dependence of NH₃, NO₂ and SO₂ in the air of the experiment room. (a) NH₃, NO₂ concentration, (b) SO₂ concentration.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 5| Part 3| May 1998| Pages 1141-1143

https://doi.org/10.1107/S0909049597017603

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