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Figure 1
The bending-magnet source for EUVL beamlines, (a) the beam image and (b) the beam divergence. Tick-marks in (a) and (b) correspond to 1 mm and 0.02 rad, respectively. |
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Figure 1
The bending-magnet source for EUVL beamlines, (a) the beam image and (b) the beam divergence. Tick-marks in (a) and (b) correspond to 1 mm and 0.02 rad, respectively. |