Design of beamline optics for EUVL

Watanabe, T.; Haga, T.; Niibe, M.; Kinoshita, H.

doi:10.1107/S0909049597017536

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 7
The dependence of beam divergence and number of rays lost downstream of the second mirror T2 when n = 9. X′ (= dX/dZ) and Y′ (= dY/dZ) indicate horizontal and vertical beam divergence, respectively.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 5| Part 3| May 1998| Pages 1149-1152

https://doi.org/10.1107/S0909049597017536

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