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Figure 3
(a), (b) Schematics of alternating PSMs. (c) Aerial image of 0.05 µm line-and-space patterns obtained with an alternating PSM and a conventional mask. |
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Figure 3
(a), (b) Schematics of alternating PSMs. (c) Aerial image of 0.05 µm line-and-space patterns obtained with an alternating PSM and a conventional mask. |