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Figure 7
Simulation results for the required surface figure error. (a) Figure error of M1: 0.42 nm; M2, 0.45 nm; M3: 0.6 nm. (b) M1: 0.8 nm; M2: 0.65 nm; M3: 0.9 nm. |
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Figure 7
Simulation results for the required surface figure error. (a) Figure error of M1: 0.42 nm; M2, 0.45 nm; M3: 0.6 nm. (b) M1: 0.8 nm; M2: 0.65 nm; M3: 0.9 nm. |