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Figure 3
(a) V1 (ion acceleration voltage) dependence of the TOF spectrum for the SiH2Cl2-saturated Si(001) surface. (bV1 dependence of the time of flight for PSD ions of 1H+ and 35Cl+ obtained from (a).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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