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Figure 2
Ray-tracing simulations showing the beam spot size and profile in the exit-slit plane for the 4300 grooves mm−1 grating for λ and λ±Δλ, withλ/Δλ = 105, at λ = 30, 60 and 90 nm. The beam size of the light-source is assumed to be 0.39 and 0.425 mm in the horizontal and vertical directions, respectively. The photon beam divergence is taken as 0.3 mrad in both directions. The corresponding beam profiles have been rotated respectively by 0.30, 0.195 and 0.097° (see text and Namioka, 1959BB10). This shows that the target resolving power of 105 can be achieved at λ = 30, 60 and 90 nm with 7, 14 and 21 µm slits, respectively.

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