Design and fabrication of highly heat-resistant Mo/Si multilayer soft X-ray mirrors with interleaved barrier layers

Takenaka, H.; Ito, H.; Haga, T.; Kawamura, T.

doi:10.1107/S0909049598000491

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 4
(a) Measured soft X-ray reflectivities for the as-deposited and 673 K-heated Mo/C/Si/C multilayers. (b) Measured soft X-ray reflectivities for the as-deposited and 673 K-heated Mo/Si multilayers.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 5| Part 3| May 1998| Pages 708-710

https://doi.org/10.1107/S0909049598000491

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