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Figure 3
Schematic drawing showing arrangement of three chambers of the CVD station. All pumps are turbomolecular pumps backed by a mechanical pump. Pumping speeds are 500, 500 and 700 l s−1 for the three sections of the differential pumping chamber (upstream to downstream) and 500 l s−1 for each of the analysis and reaction chambers. SR: synchrotron radiation.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 5| Part 3| May 1998| Pages 545-547
https://doi.org/10.1107/S0909049597016105
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