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Figure 5
Dependence of the etched depth on the SF6 gas pressure. The synchrotron radiation irradiation dose was 1 × 104 mA min. Observed values at 1 × 10−7 torr and 5 × 10−6 torr are within the measurement error (∼±5 nm).

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SYNCHROTRON
RADIATION
ISSN: 1600-5775
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