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Figure 6
Dependence of the etched depth on the synchrotron radiation irradiation dose. The SF6 gas pressure was 0.05 torr.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 5| Part 6| November 1998| Pages 1363-1368
https://doi.org/10.1107/S0909049598011534
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