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Figure 12
Comparison of the FWHM of the Si(111) reflection from a single crystal and a powder. The energy of the radiation was made equal to Cu Kα radiation. Note that in contrast to Fig. 11[link] the full Bragg angle 2θ is plotted. The wing at the low-angle side of the single-crystal peak results from deformations of the wafer due to ion implantation.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 6| Part 6| November 1999| Pages 1076-1085
doi:10.1107/S0909049599010663
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