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Figure 12
Comparison of the FWHM of the Si(111) reflection from a single crystal and a powder. The energy of the radiation was made equal to Cu Kα radiation. Note that in contrast to Fig. 11[link] the full Bragg angle 2θ is plotted. The wing at the low-angle side of the single-crystal peak results from deformations of the wafer due to ion implantation.

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