Figure 1
Calculation of the effect of partially coherent illumination of the zone plate on image quality and resolution for a zone plate with a central stop of half the zone plate diameter. (a) Contours of the modulation transfer function as a function of the coherence parameter, p (equal to the source size multiplied by the full-angle accepted divided by the wavelength λ), and the normalized spatial frequency (spatial frequency divided by λ/4NA, where NA is the numerical aperture). (b) Surface rendering of the point spread function as a function of the coherence parameter, p, and the radial coordinate normalized to the Rayleigh resolution. Full spatial resolution is preserved for p ≤ 1. |