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Figure 1
Schematic view of the steps of the lens-fabrication process. (a) Membrane definition; (b) electron beam exposure and development; (c) 30 nm Cr lift-off; (d) orientation-selective wet etching. |
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Figure 1
Schematic view of the steps of the lens-fabrication process. (a) Membrane definition; (b) electron beam exposure and development; (c) 30 nm Cr lift-off; (d) orientation-selective wet etching. |