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Figure 5
Micrograph of a gold test pattern (period 2 µm, thickness 2 µm) taken at 25 keV with an Al lens (N = 120, R = 0.2 mm, f = 1.05 m). The image of the pattern was magnified ×21 onto a CCD detector (L1 = 1.10 m, L2 = 23 m).

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