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Figure 5
Atomic force microscopy images (close-up view) of the polished surface of a Cu/Al multilayer Fresnel zone plate with 50 layers and an outermost zone width of 0.25 µm on an Au wire substrate of diameter 50 µm: (a) finished by the dry polishing process; (b) finished by the wet polishing process.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 9| Part 3| April 2002| Pages 154-159
doi:10.1107/S0909049502003746
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