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Figure 3
Measured edge response (dots), the fitted curve with an error function assuming a uniform background (solid line) and the derivative of the fitted curve (dashed line) are shown. The FWHM of the derivative was evaluated to be 220 nm, which corresponds to the spatial resolution of the microscope. The inset is a magnified image of an edge structure. The dots are averaged values inside the white rectangle in the magnified image. The image was recorded with the diffuser. The magnification of the zooming tube was ×100 and the exposure time was 10 min.

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ISSN: 1600-5775
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