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Figure 5
Theoretical line-spread function. Grey line: line-spread function for perfect coherent illumination. Black line: line-spread function for a geometrical spot size of 0.06 µm. |
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Figure 5
Theoretical line-spread function. Grey line: line-spread function for perfect coherent illumination. Black line: line-spread function for a geometrical spot size of 0.06 µm. |