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Figure 5
Plane-wave topographs of the CZ-Si wafer containing dislocations, taken at (a) 234 cm and (b) 13 cm from the sample, using the 111 reflection.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 9| Part 3| April 2002| Pages 169-173
doi:10.1107/S0909049502004302
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