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Figure 7
Plane-wave topographs of the slowly grown CZ-Si wafer containing microdefects, taken at 78 mm from the sample using the 220 reflection. The marked area in (a) is enlarged and shown in (b).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 9| Part 3| April 2002| Pages 169-173
doi:10.1107/S0909049502004302
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