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Figure 8
Comparison of topographic images of grown-in microdefects in the slowly grown CZ-Si wafer. The topographs were taken at 6 mm, 78 mm and 215 cm from the sample using 000 and 220 reflections. |
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Figure 8
Comparison of topographic images of grown-in microdefects in the slowly grown CZ-Si wafer. The topographs were taken at 6 mm, 78 mm and 215 cm from the sample using 000 and 220 reflections. |