Deterministic retrieval of surface waviness by means of topography with coherent X-rays

Souvorov, A.; Yabashi, M.; Tamasaku, K.; Ishikawa, T.; Mori, Y.; Yamauchi, K.; Yamamura, K.; Saito, A.

doi:10.1107/S0909049502008804

Figure 5
Comparison of surface profiles obtained by an optical interferometer (solid line) and X-ray topography (dashed line). The difference in surface heights between the two measurements has a standard deviation of $[\sigma_{\Delta{h}}]$ ≃ 3 Å.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 9| Part 4| June 2002| Pages 223-228

doi:10.1107/S0909049502008804

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