Figure 2
Orientation and deviatoric stress maps for a 0.75 µm-thick Al (0.5% Cu) thin film. Three structures are shown: a 5 × 5 µm area within an unpassivated pad (a) and passivated lines of width 4.1 µm (b) and 0.7 µm (c). The gray-level differences between grains in the orientation map are correlated to their in-plane orientation. |