Interferometer-controlled scanning transmission X-ray microscopes at the Advanced Light Source

Kilcoyne, A.L.D.; Tyliszczak, T.; Steele, W.F.; Fakra, S.; Hitchcock, P.; Franck, K.; Anderson, E.; Harteneck, B.; Rightor, E.G.; Mitchell, G.E.; Hitchcock, A.P.; Yang, L.; Warwick, T.; Ade, H.

doi:10.1107/S0909049502017739

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Figure 11
Images of test patterns and their contrast. Acquired with STXM at beamline 5.3.2. Top left: Berkeley logo and sequence of dots whose sizes range from 250 nm down to 75 nm. Bottom left: 30 nm angular features with 1:1 mark:space ratio. Right side: line profiles of periodic structures with feature size and mark:space ratio as indicated.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 10| Part 2| March 2003| Pages 125-136

https://doi.org/10.1107/S0909049502017739

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